AFS 3220 from ADE Technologies

AFS 3220, utilize high voltage fast differential charge amplifiers with low noise DAC oscillator, 375 KHz synchronized DC/DC converter power supplies, antialising filter and ADC.

Used in silicon quality and process control applications to perform noncontact wafer geometry measurements, the 300-mm Advanced Flatness system measures and reports SEMI-standard wafer shape, flatness, thickness, and resistivity results. The multifunctional wafer-flatness measurement and sorting system can also be used in ultrathin SOI, epitaxial, prepolish, and reclaim wafer operations to perform process setup, in-line quality control, and product certification.